Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use...

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Bibliographic Details
Main Author: Frühauf, Joachim (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
Subjects:
Materials science.
Chemical engineering.
Microwaves.
Optical engineering.
Electronics.
Microelectronics.
Optical materials.
Electronic materials.
Materials Science.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Ceramics, Glass, Composites, Natural Methods.
Microwaves, RF and Optical Engineering.
Industrial Chemistry/Chemical Engineering.
Online Access:Full Text via HEAL-Link
Table of Contents:
  • Technological Basis of Bulk-Silicon-Microtechnique
  • Orientation Dependent Etching of Silicon
  • General Overview of the Shape- and Functional Elements and the Procedure of their Design
  • Simple Shape Elements
  • Elements for Mechanical Applications
  • Elements for Fluidic Applications
  • Elements for Optical Applications.

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