Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use...

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Bibliographic Details
Main Author: Frühauf, Joachim (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
Subjects:
Materials science.
Chemical engineering.
Microwaves.
Optical engineering.
Electronics.
Microelectronics.
Optical materials.
Electronic materials.
Materials Science.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Ceramics, Glass, Composites, Natural Methods.
Microwaves, RF and Optical Engineering.
Industrial Chemistry/Chemical Engineering.
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ΒΚΠ - Πατρα: ALFd

Holdings details from ΒΚΠ - Πατρα: ALFd
Call Number: 330.01 BAU
Copy 1 Available

ΒΚΠ - Πατρα: BSC

Holdings details from ΒΚΠ - Πατρα: BSC
Call Number: 330.01 BAU
Copy 2 Available
Copy 3 Available

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