Microsystems Dynamics
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...
| Main Authors: | , |
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| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
2011.
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| Series: | Intelligent Systems, Control and Automation: Science and Engineering,
44 |
| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
