Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριοι συγγραφείς: Zhang, Yafei (Συγγραφέας), Chen, Da (Συγγραφέας)
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Θέματα:
Engineering.
Solid state physics.
Nanotechnology.
Materials > Surfaces.
Thin films.
Nanotechnology and Microengineering.
Surfaces and Interfaces, Thin Films.
Solid State Physics.
Διαθέσιμο Online:Full Text via HEAL-Link
Πίνακας περιεχομένων:
  • Introduction
  • Propagation of Acoustic Wave in Crystals
  • The Theory of FBAR
  • The Sputtering Deposition and Etching of AlN Film
  • The Membrane Structured FBAR
  • Solidly Mounted Acoustic Resonator
  • The Application of FBAR in RF Filters
  • The FBAR Excited by Lateral Filed
  • High Sensitive Sensors Based on FBAR.

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