Semiconductor-On-Insulator Materials for Nanoelectronics Applications
"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achiev...
Corporate Author: | |
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Other Authors: | , , , , , |
Format: | Electronic eBook |
Language: | English |
Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2011.
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Series: | Engineering Materials,
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Subjects: | |
Online Access: | Full Text via HEAL-Link |
Table of Contents:
- New semiconductor-on-insulator materials
- Physics of modern SemOI devices
- Diagnostics of the SOI devices
- Sensors and MEMS on SOI.