High-Resolution X-Ray Scattering from Thin Films and Multilayers

High-Resolution X-Ray Scattering from Thin Films and Multilayers

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...

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Bibliographic Details
Main Authors: Holy, Vaclav (Author, http://id.loc.gov/vocabulary/relators/aut), Pietsch, Ullrich (http://id.loc.gov/vocabulary/relators/aut), Baumbach, Tilo (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1999.
Edition:1st ed. 1999.
Series:Springer Tracts in Modern Physics, 149
Subjects:
Lasers.
Photonics.
Materials-Surfaces.
Thin films.
Crystallography.
Optics, Lasers, Photonics, Optical Devices.
Surfaces and Interfaces, Thin Films.
Crystallography and Scattering Methods.
Online Access:Full Text via HEAL-Link
Table of Contents:
  • Basic elements of the equipment
  • Diffractometers and reflectometers
  • Scans and resolution in angular and reciprocal space
  • Basic principles
  • Kinematical scattering theory
  • Dynamical scattering theory
  • Layer thicknesses of single layers and multilayers
  • Lattice parameters and lattice strains in single expitaxial layers
  • Volume defects in layers
  • X-ray reflection by rough multilayers
  • X-ray scattering by gratings and dots
  • A. Wave vectors and amplitudes of the internal wavefields in a dynamically scattering crystal.

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