Scanning Electron Microscopy Physics of Image Formation and Microanalysis /
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
1998.
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| Edition: | 2nd ed. 1998. |
| Series: | Springer Series in Optical Sciences,
45 |
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| Online Access: | Full Text via HEAL-Link |
| Summary: | Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information. |
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| Physical Description: | XIV, 529 p. online resource. |
| ISBN: | 9783540389675 |
| ISSN: | 0342-4111 ; |
| DOI: | 10.1007/978-3-540-38967-5 |
