Precursor Chemistry of Advanced Materials
Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new ro...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2005.
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| Series: | Topics in Organometallic Chemistry,
9 |
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| Online Access: | Full Text via HEAL-Link |
