Nanofabrication Principles, Capabilities and Limits /

Nanofabrication Principles, Capabilities and Limits /

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This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...

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Bibliographic Details
Main Author: Cui, Zheng (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
Edition:2nd ed. 2017.
Subjects:
Engineering.
Continuum mechanics.
Nanotechnology.
Electronic circuits.
Nanotechnology and Microengineering.
Continuum Mechanics and Mechanics of Materials.
Circuits and Systems.
Classical Electrodynamics.
Online Access:Full Text via HEAL-Link
Table of Contents:
  • 1. Introduction
  • 2. Nanofabrication by Photons
  • 3. Nanofabrication by Electron Beam
  • 4. Nanofabrication by Ion Beam
  • 5. Nanofabrication by Scanning Probes
  • 6. Nanofabrication by Replication
  • 7. Nanoscale Pattern Transfer by Etching
  • 8. Nanoscale Pattern Transfer by Deposition
  • 9. Indirect Nanofabrication
  • 10. Nanofabrication by Self-Assembly
  • 11. Applications of Nanofabrication Technologies.

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