Bonding in Microsystem Technology
Bonding in Microsystem Technology starts with descriptions of terminology, kinds of microsystems and market analysis. Followed by the presentation of mechanisms of wet etching, set of process parameters, description of micromachining methods, examples of procedures, process flow-charts and applicati...
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| Format: | Electronic eBook |
| Language: | English |
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Dordrecht :
Springer Netherlands,
2006.
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| Series: | Springer Series in Advanced Microelectronics,
24 |
| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
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