Introductory MEMS Fabrication and Applications /

Introductory MEMS Fabrication and Applications /

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...

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Bibliographic Details
Main Authors: Adams, Thomas M. (Author), Layton, Richard A. (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Boston, MA : Springer US, 2010.
Edition:1.
Subjects:
Engineering.
Mechanics.
Continuum mechanics.
Electronics.
Microelectronics.
Electronic circuits.
Materials > Surfaces.
Thin films.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Surfaces and Interfaces, Thin Films.
Continuum Mechanics and Mechanics of Materials.
Online Access:Full Text via HEAL-Link

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ΒΚΠ - Πατρα: ALFd

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Call Number: 330.01 BAU
Copy 1 Available

ΒΚΠ - Πατρα: BSC

Holdings details from ΒΚΠ - Πατρα: BSC
Call Number: 330.01 BAU
Copy 2 Available
Copy 3 Available

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