Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines

Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines

Bibliographic Details
Main Author: Lang, Jeffrey
Corporate Author: SpringerLink (Online service)
Format: Electronic Kit Book
Language:English
Published: Boston, MA Springer-Verlag US 2010
Series:MEMS Reference Shelf
Subjects:
Engineering
Computer engineering
Electronics
Systems engineering
Electric engineering
Electronics and Microelectronics, Instrumentation
Energy Technology
Circuits and Systems
Electrical Engineering
Energy, general
Online Access:http://dx.doi.org/10.1007/978-0-387-77747-4

Internet

http://dx.doi.org/10.1007/978-0-387-77747-4

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