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|a eng
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|a Perevoschikov, Victor A.
|9 66883
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1 |
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|a Gettering Defects in Semiconductors
|h [electronic resource]
|c by Victor A. Perevoschikov, Vladimir D. Skoupov
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|a Berlin, Heidelberg
|b Springer Berlin Heidelberg
|c 2005
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| 300 |
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|b v.: digital
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|a Springer Series in Advanced Microelectronics
|v 19
|x 1437-0387
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| 650 |
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4 |
|a Optical materials
|9 64444
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| 650 |
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4 |
|a Chemical engineering
|9 64414
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| 650 |
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4 |
|a Chemistry
|9 11013
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| 650 |
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|a Optical and Electronic Materials
|9 64446
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|a Industrial Chemistry/Chemical Engineering
|9 64417
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|a Skoupov, Vladimir D.
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|a Springer Series in Advanced Microelectronics
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